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流體環(huán)境中靜電微懸臂梁的多場耦合仿真分
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-physics Analysis of an Electrostatically Actuated Microcantilever in Viscous Fluids
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    摘要:

    微器件動力學(xué)特性通常受到周圍粘性流體阻尼的強(qiáng)烈影響,,在器件優(yōu)化設(shè)計(jì)中,,需要建立靜電—結(jié)構(gòu)—流體三場耦合模型才能細(xì)致考慮這些影響。為研究微開關(guān)在粘性流體介質(zhì)中的動/靜態(tài)特性和流體阻尼,,建立以Navier-Stokes方程描述流體特性的靜電微開關(guān)模型并進(jìn)行數(shù)值分析,;與相關(guān)文獻(xiàn)結(jié)果比較驗(yàn)證了計(jì)算的正確性,;得到了空氣和去離子水介質(zhì)中微開關(guān)的靜/動態(tài)閉合電壓,、不同階躍電壓驅(qū)動下的閉合特性和流體阻尼力分布的情況。分析認(rèn)為,,微開關(guān)動/靜態(tài)閉合電壓的差異在介質(zhì)粘性較大環(huán)境中較小,,而在介質(zhì)粘性較小環(huán)境中較大。

    Abstract:

    The dynamical behavior of MEMS devices is strongly affected by viscous fluid damping effects from the surrounding. These damping effects have to be carefully considered for the design and optimization. For predicting the hydrodynamic loading of an electrostatical device in viscous fluids, it is necessary to build an electrostatic-mechanical-fluidic coupled model, where the flows characteristics were described by Navier-Stokes equations. Comprehensive analyses of the static/dynamic closing behaviors of the microswitch in viscous fluids were performed. Compared with published work of other researchers available in the literature, the numerical model was validated. After that, the static/dynamic closing voltages of the microswitch in the air and deionized water were calculated. The transient behaviors of microswitch under different action voltages were also simulated, including the squeeze-film damping pressure distribution as well. The results show that the difference between the static and the dynamic pull-in voltage in the deionized water is smaller than that in air.

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林謝昭,應(yīng)濟(jì),陳子辰.流體環(huán)境中靜電微懸臂梁的多場耦合仿真分[J].農(nóng)業(yè)機(jī)械學(xué)報,2009,40(3):203-207.-physics Analysis of an Electrostatically Actuated Microcantilever in Viscous Fluids[J]. Transactions of the Chinese Society for Agricultural Machinery,2009,40(3):203-207.

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