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氬氫體積比對磁控濺射制備AlxOy/PET阻隔膜的影響
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Characterization of AlxOy Barrier Films on PET Substrate Prepared by Magnetron Sputtering
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    摘要:

    采用直流電源，以純鋁為靶,，氧氣為反應(yīng)氣體,，高純氬氣為濺射氣體磁控濺射在PET基底上制備高阻隔性AlxOy/PET包裝薄膜,，并研究不同氬氫體積比對AlxOy薄膜形貌,、成分,、結(jié)構(gòu)的影響,，討論了鍍AlxOy膜后DET力學(xué)性能與阻隔性能的變化,。FTIR與XPS研究分析表明，反應(yīng)氧氣量直接影響AlxOy薄膜的化學(xué)結(jié)構(gòu),，薄膜的紅外光譜的峰值,、強(qiáng)度和帶寬等變化規(guī)律均與氧氣量有關(guān)，并且AlxOy中氧原子的含量越高,，Al—O伸縮振動峰的波數(shù)越高,。測量薄膜的阻隔性與力學(xué)性能顯示，AlxOy膜化學(xué)成分越接近于Al2O3時阻隔性能越好,，且薄膜橫向,、縱向彈性模量及屈服強(qiáng)度越大。此外,，鍍AlxOy薄膜單向拉伸力學(xué)特征有明顯變化,，其應(yīng)力-應(yīng)變曲線有2個明顯的拐點(diǎn)。

    Abstract:

    Aluminum oxide (AlxOy) films were deposited on the polyethylene terephthalate (PET) foils as barrier coatings using conventional DC magnetron sputtering, in which argon, oxygen and pure aluminum were used as a sputtering gas, reaction gas and target, respectively. The influences of oxygen and argon flux ratios on the surface morphology, stoichiometry and structure of AlxOy films were investigated. The mechanic and barrier properties of AlxOy/PET were discussed, too. Fourier transform infrared spectrum (FTIR) and X-ray photoelectron spectroscopy (XPS) investigations indicated that a strong relation between oxygen addition and compositions of AlxOy films, the aluminum oxide IR spectrum’s peak value, the intensity and the band width. Also, the Al—O expansion vibration peak’s wave number was proportional to the oxygen atom content in AlxOy. The studies about films barrier and mechanical characteristics demonstrated when the ratio of y and x in AlxOy film was closer to 1.5, the barrier property was better and horizontal, vertical elastic modulus and yield strength were greater. In addition, the mechanical characteristics of AlxOy/PET films significantly changed as the films were stretched, there were two significant turning points in stress-strained curve. 

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劉壯,林晶,孫智慧.氬氫體積比對磁控濺射制備AlxOy/PET阻隔膜的影響[J].農(nóng)業(yè)機(jī)械學(xué)報,2010,41(10):165-169.Characterization of AlxOy Barrier Films on PET Substrate Prepared by Magnetron Sputtering[J]. Transactions of the Chinese Society for Agricultural Machinery,2010,41(10):165-169.

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