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壓電型宏微雙驅(qū)動(dòng)精密定位系統(tǒng)點(diǎn)位協(xié)調(diào)控制
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國家自然科學(xué)基金資助項(xiàng)目(50875209)


Positioning Control of Piezoelectric Macro-micro Dual Drive
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    摘要:

    設(shè)計(jì)了基于壓電型微驅(qū)動(dòng)器的宏微雙驅(qū)動(dòng)精密定位系統(tǒng),,宏動(dòng)臺(tái)由伺服電動(dòng)機(jī)直接驅(qū)動(dòng),微動(dòng)臺(tái)由壓電陶瓷驅(qū)動(dòng)器和彈性鉸鏈構(gòu)成,,并由壓電陶瓷驅(qū)動(dòng)器驅(qū)動(dòng),。微動(dòng)臺(tái)安裝在宏動(dòng)臺(tái)上,,微動(dòng)臺(tái)和宏動(dòng)臺(tái)是串聯(lián)關(guān)系。宏動(dòng)臺(tái)用于實(shí)現(xiàn)大行程微米級(jí)定位,,而納米級(jí)定位由微動(dòng)臺(tái)實(shí)現(xiàn),。利用基于運(yùn)動(dòng)控制卡的開放伺服功能來協(xié)調(diào)宏微工作臺(tái)之間的控制,而位置反饋由兩個(gè)高精度光柵完成,,精度檢測(cè)由激光干涉儀完成,。當(dāng)宏動(dòng)臺(tái)運(yùn)動(dòng)結(jié)束后,微動(dòng)臺(tái)根據(jù)測(cè)得的定位誤差做出補(bǔ)償進(jìn)給,。實(shí)驗(yàn)表明,,在行程100mm的范圍內(nèi)每隔1mm采集一點(diǎn),誤差控制在±100nm以內(nèi)。

    Abstract:

    Based on the piezoelectric driver, a macro-micro dual drive precision positioning system was designed. The macro stage of the system was drove by servo motor. The micro stage was consisted of piezoelectric driver and flexible hinge, and drove by the former. The micro stage was mounted on the macro stage and showed a series connection. The macro stage and micro stage were used to realize large workspace and compensate the error of position, respectively. With the open serve control of motion control card, the control system of macro motion and micro motion was harmonized. The positioning feedback was realized by two high precision optical grating. The precision detection was completed by laser interferometer. In the whole closed loop control system, the micro stage compensated the position error when the macro stage finished moving. Experiment results showed that within the travel range of 100mm,the position error in every millimeter was less than ±100nm.

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劉定強(qiáng),黃玉美,謝禮,楊勇.壓電型宏微雙驅(qū)動(dòng)精密定位系統(tǒng)點(diǎn)位協(xié)調(diào)控制[J].農(nóng)業(yè)機(jī)械學(xué)報(bào),2011,42(4):220-223,233. Liu Dingqiang, Huang Yumei, Xie Li, Yang Yong. Positioning Control of Piezoelectric Macro-micro Dual Drive[J]. Transactions of the Chinese Society for Agricultural Machinery,2011,42(4):220-223,233.

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