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精密微動(dòng)縮小機(jī)構(gòu)設(shè)計(jì)與剛度分析
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國(guó)家自然科學(xué)基金面上項(xiàng)目(52475537)、西安市科技計(jì)劃項(xiàng)目-科學(xué)家+工程師隊(duì)伍建設(shè)項(xiàng)目(24KGDW0029),、陜西省教育廳服務(wù)地方專項(xiàng)項(xiàng)目(23JC050),、陜西省創(chuàng)新能力支撐計(jì)劃項(xiàng)目(2021TD-27)和西安市碑林區(qū)科技計(jì)劃項(xiàng)目(GX2434)


Precision Reduction Mechanism Design and Stiffness Analysis
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    摘要:

    精密微動(dòng)縮小機(jī)構(gòu)能夠提供較小空間內(nèi)精密運(yùn)動(dòng)位移,可廣泛應(yīng)用于微電子,、醫(yī)療器械和芯片封裝等精密操作領(lǐng)域,。本文基于柔性鉸鏈杠桿原理和無附加運(yùn)動(dòng)原理設(shè)計(jì)一種精密微動(dòng)縮小機(jī)構(gòu),該機(jī)構(gòu)能夠?qū)⑤斎胛灰瓢凑?∶1精密縮小,且在運(yùn)動(dòng)過程中無附加力及位移,。通過等效剛度法對(duì)所設(shè)計(jì)的精密微動(dòng)縮小機(jī)構(gòu)進(jìn)行剛度分析,,計(jì)算得到該機(jī)構(gòu)理論剛度為75.72 N/μm;采用有限元法分析得到精密微動(dòng)縮小機(jī)構(gòu)剛度為74.06 N/μm,;采用實(shí)驗(yàn)法測(cè)得到精密微動(dòng)縮小機(jī)構(gòu)剛度為68.86 N/μm,。理論分析結(jié)果與有限元分析結(jié)果誤差為2.19%,理論分析結(jié)果與實(shí)驗(yàn)結(jié)果誤差為9.06%,,分析結(jié)果驗(yàn)證了等效剛度法分析方法的有效性及精確性,。研究結(jié)果對(duì)精密微動(dòng)機(jī)構(gòu)設(shè)計(jì)及剛度分析具有重要的理論參考價(jià)值。

    Abstract:

    Precision micromotion reduction mechanism can provide precision motion displacement in a small space, which can be widely used in microelectronics, medical devices and chip packaging and other precision operation fields. A precision micromotion reduction mechanism was designed-based on the principle of flexible hinge lever and the principle of no additional motion, which was able to reduce the input displacement according to 2∶1 precision, and there was no additional force and displacement in the process of motion. The stiffness analysis of the designed precision micromotion reduction mechanism was carried out by the equivalent stiffness method, and the theoretical stiffness of the mechanism was calculated to be 75.72 N/μm;the stiffness of the precision micromotion reduction mechanism was analyzed by the finite element method to be 74.06 N/μm;and the stiffness of the precision micromotion reduction mechanism was measured by the experimental method to be 68.86 N/μm. The error between the theoretical analysis results and finite element analysis results was 2.19%, and the error between the theoretical analysis results and experimental results was 9.06%. The analysis results verified the validity and accuracy of the analysis method of equivalent stiffness method. The results of the study had important theoretical reference value for the design and stiffness analysis of precision micromanipulation mechanism.

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楊滿芝,王悅,張曉棟,張傳偉,韓飛燕,馮斌.精密微動(dòng)縮小機(jī)構(gòu)設(shè)計(jì)與剛度分析[J].農(nóng)業(yè)機(jī)械學(xué)報(bào),2025,56(3):531-538. YANG Manzhi, WANG Yue, ZHANG Xiaodong, ZHANG Chuanwei, HAN Feiyan, FENG Bin. Precision Reduction Mechanism Design and Stiffness Analysis[J]. Transactions of the Chinese Society for Agricultural Machinery,2025,56(3):531-538.

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  • 收稿日期:2025-01-02
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  • 在線發(fā)布日期: 2025-03-10
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